@entry{maj-fan-rut-xie-05-aa, author = {JD Ma and CF Fang and RA Rutenbar and X Xie...}, title = {Interval-valued statistical modeling of oxide chemical-mechanical polishing}, journal = {ICCAD-2005. IEEE ...,}, volume = {}, number = {}, pages = {}, year = 2005, month = , doi = {}, comment = {}, abstract = {}, url = {{\url{https://ieeexplore.ieee.org/abstract/document/1560054/?casa_token=4rNujWF7oUEAAAAA:YtOUNOkU2CcgSfIUewgTOl1pS8vKqv1y75rP4miPfi0RxcRM_i_SOM9ovyk2yfig_SWco5DK}}}, quotes = {... The affine arithmetic library and the four interval-valued statistical CMP modeling algorithms have been implemented in C/C++ and tested on a 1.0GHz UNIX machine using two layout ...} }